Core Competencies & Application Focus
Key Features & Technical Advantages
High-Capacity Process Maturity: Boasting a proven, high-capacity process, the machine ensures reliability and consistency in large-scale production environments.
Dual-Mode Temperature Control: Incorporating advanced dual- control technology, it achieves precise and stable temperature regulation, critical for optimal film deposition quality.
Film Gauge Protection: A unique film gauge protection technology safeguards against potential defects, ensuring every layer meets the highest quality standards.
Diverse Coating Technologies: The machine supports a versatile range of coating technologies, including multi-layer composite films and doped polysilicon, catering to diverse manufacturing requirements.
Conclusion
HAN'S LASER LPCVD Coating Machine is the ultimate choice for manufacturers seeking to elevate their semiconductor and photovoltaic production capabilities. With its blend of advanced technologies, proven process maturity, and comprehensive safety features, it empowers businesses to achieve greater efficiency, precision, and scalability in their production lines. Contact us today to discover how HAN'S LASER LPCVD Coating Machine can transform your manufacturing processes.
| Item | Technical Parameter |
| Types of film formation | SiOX , i/d-Poly-Si |
| Loading size | Vertical loading method： 1400 pcs/ batch（182mm） , 1200片/ batch（210mm） Horizontal loading method： 2000 pcs/ batch（182mm） , 1800pcs/ batch（210mm） |
| Film thickness uniformity | SiOx uniformity: Adjustable thickness from 1-3nm, with 0.1nm precision, the thickness of SiOx is tested by polishing sheet; Poly uniformity: Adjustable thickness 50-200nm, with 0.1nm precision, the thickness of Poly thickness is tested by polishing sheet, within sheet: ≤4%,; between sheets≤4%; between batches ≤3% (>100nm) |
| UP -TIME | ≥95% |
| Range of working temperature | 400-750 °C |
| Temperature Control | 6-point temperature control, internal and external dual-mode control |
| Heating method | Automatic slope heating and fast constant temperature function |
| Cooling method | The latest patented technology, 6 temperature zone section control active cooling furnace body |
| Accuracy and length of constant temperature zone | ± 1℃ （550-700 ℃） |
| Warming-up time | RT 750 °C ≤ 45 min |
| Cooling rate | ≥ 5℃ /min |
| Temperature control | Dual-mode precise control 1000mm/min continuously adjustable; Positioning accuracy ≤±1 mm; |
| The ultimate vacuum of the system | <3Pa |
| System air leak rate | The rate of pressure rise after the pump is stopped and the valve is closed＜ 2 Pa /min |
| Pressure control method | Quickly adjust fully automatic closed loop |
| Process control method | Process automatic control, multiple safety chain alarms |
| Human-computer interface | LCD display, touch operation, process editing, online monitoring, authority management, team management, networking function |
| MES | Equipped |
